Remove both from the car.
I use mass air flow sensor cleaner on the MAF and carb cleaner on the IAC.
Apparently, carb cleaner can leave a residue on the mass air flow and you don't want that.
MAF - I always spray the cleaner on the sensor in both directions but the last direction matches that of the incoming air flow. You may also need to take a q-tip or something similar and GENTLY rub the mass air flow sensor's element(s). I haven't done that one yet though.
IAC - I usually just spray the cleaner into both holes, shake it up and allow it to drain out. I do this process several times.
Make sure you use dielectric grease on the sensors' connections when you reinstall in the car. That alone can make a world of difference in how the car runs.
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